Low-Overvoltage Microanalysis: an Alternative High Resolution Strategy to Low-Voltage Microanalysis
نویسندگان
چکیده
منابع مشابه
Barriers to Quantitative Electron Probe X-Ray Microanalysis for Low Voltage Scanning Electron Microscopy
Low voltage x-ray microanalysis, defined as being performed with an incident beam energy ≤5 keV, can achieve spatial resolution, laterally and in depth, of 100 nm or less, depending on the exact selection of beam energy and the composition of the target. The shallow depth of beam penetration, with the consequent short path length for x-ray absorption, and the low overvoltage, the ratio of beam ...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2002
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927602100997